2017 KEYENCE IM-7020

HEAD............ BACKLIGHTING/PROGRAMMABLE RING-ILLUMINATION UNIT/LIGHT PROBE UNIT
IMAGE SENSOR.... 1” 6.6 MEGA PIXEL MONOCHROME CMOS
DISPLAY......... 10. 4” LCD MONITOR (XGA: 1024 × 768)
RECEIVER LENS... DOUBLE TELECENTRIC LENS
XY STAGE MOVING RANGE....... 3.94” × 3.94" (ELECTRIC)
XY STAGE WITHSTAND LOAD..... 11 LBS
Z STAGE MOVING RANGE........ 2.95” (ELECTRIC)
APPROXIMATE WEIGHT.......... 69 LBS

IMAGE MEASUREMENT:

WIDE-FIELD MEASUREMENT MODE........ 7.87" × 7.87" (4X R50)
HIGH-PRECISION MEASUREMENT MODE.... 4.92" × 4.92"
MINIMUM DISPLAY UNIT............... 0.1 µM

REPETITION ACCURACY W/O STAGE MOVEMENT:
WIDE-FIELD MEASUREMENT MODE........ ±1 µM
HIGH-PRECISION MEASUREMENT MODE.... ±0.5 µM

REPETITION ACCURACY WITH STAGE MOVEMENT:
WIDE-FIELD MEASUREMENT MODE........ ±2 µM
HIGH-PRECISION MEASUREMENT MODE.... ±1.5 µM

MEASUREMENT ACCURACY (±2Σ) W/O BINDING:
WIDE-FIELD MEASUREMENT MODE........ ±5 µM
HIGH-PRECISION MEASUREMENT MODE.... ±2 µM

MEASUREMENT ACCURACY WITH BINDING:
WIDE-FIELD MEASUREMENT MODE........ ±(7+0.02 L) µM
HIGH-PRECISION MEASUREMENT MODE.... ±(4+0.02L) µM

LIGHT PROBE MEASUREMENT:

MEASURABLE AREA (XY)............... 3.54” × 3.54"
MAXIMUM MEASUREMENT DEPTH.......... 1.18"
LIGHT PROBE DIAMETER............... Ø0.12"
MEASURING FORCE.................... 0.015 N
REPEATABILITY...................... ±2 µM
MEASUREMENT ACCURACY............... (8+0.02 L) µM